diff --git a/3rdparty/civetweb/civetweb.cmake b/3rdparty/civetweb/civetweb.cmake
index dc8d556ea64..5d4749fe4e7 100644
--- a/3rdparty/civetweb/civetweb.cmake
+++ b/3rdparty/civetweb/civetweb.cmake
@@ -3,8 +3,8 @@ include(ExternalProject)
 ExternalProject_Add(
     ext_civetweb
     PREFIX civetweb
-    URL https://github.com/civetweb/civetweb/archive/refs/tags/v1.15.tar.gz
-    URL_HASH SHA256=90a533422944ab327a4fbb9969f0845d0dba05354f9cacce3a5005fa59f593b9
+    URL https://github.com/civetweb/civetweb/archive/refs/tags/v1.16.tar.gz
+    URL_HASH SHA256=f0e471c1bf4e7804a6cfb41ea9d13e7d623b2bcc7bc1e2a4dd54951a24d60285
     DOWNLOAD_DIR "${OPEN3D_THIRD_PARTY_DOWNLOAD_DIR}/civetweb"
     UPDATE_COMMAND ""
     CMAKE_ARGS
diff --git a/3rdparty/find_dependencies.cmake b/3rdparty/find_dependencies.cmake
index 169bfbe1a54..d929b27728a 100644
--- a/3rdparty/find_dependencies.cmake
+++ b/3rdparty/find_dependencies.cmake
@@ -96,8 +96,6 @@ function(open3d_build_3rdparty_library name)
     if(arg_SOURCES)
         foreach(src IN LISTS arg_SOURCES)
             get_filename_component(abs_src "${src}" ABSOLUTE BASE_DIR "${arg_DIRECTORY}")
-            # Mark as generated to skip CMake's file existence checks
-            set_source_files_properties(${abs_src} PROPERTIES GENERATED TRUE)
             target_sources(${name} PRIVATE ${abs_src})
         endforeach()
         foreach(incl IN LISTS include_dirs)
@@ -1030,8 +1028,6 @@ if(NOT USE_SYSTEM_QHULLCPP)
             src/libqhull_r/rboxlib_r.c
         INCLUDE_DIRS
             src/
-        DEPENDS
-            ext_qhull
     )
     open3d_build_3rdparty_library(3rdparty_qhullcpp DIRECTORY ${QHULL_SOURCE_DIR}
         SOURCES
@@ -1057,8 +1053,6 @@ if(NOT USE_SYSTEM_QHULLCPP)
             src/libqhullcpp/RoadLogEvent.cpp
         INCLUDE_DIRS
             src/
-        DEPENDS
-            ext_qhull
     )
     target_link_libraries(3rdparty_qhullcpp PRIVATE 3rdparty_qhull_r)
     list(APPEND Open3D_3RDPARTY_PRIVATE_TARGETS_FROM_CUSTOM Open3D::3rdparty_qhullcpp)
@@ -1158,8 +1152,6 @@ if (BUILD_UNIT_TESTS)
                 googletest/
                 googlemock/include/
                 googlemock/
-            DEPENDS
-                ext_googletest
         )
     endif()
 endif()
@@ -1190,8 +1182,6 @@ if(BUILD_GUI)
                 imgui_tables.cpp
                 imgui_widgets.cpp
                 imgui.cpp
-            DEPENDS
-                ext_imgui
         )
         list(APPEND Open3D_3RDPARTY_PRIVATE_TARGETS_FROM_CUSTOM Open3D::3rdparty_imgui)
     else()
diff --git a/3rdparty/googletest/googletest.cmake b/3rdparty/googletest/googletest.cmake
index 706bf35204a..dd84c07c32c 100644
--- a/3rdparty/googletest/googletest.cmake
+++ b/3rdparty/googletest/googletest.cmake
@@ -1,6 +1,6 @@
-include(ExternalProject)
+include(FetchContent)
 
-ExternalProject_Add(
+FetchContent_Declare(
     ext_googletest
     PREFIX googletest
     URL https://github.com/google/googletest/archive/refs/tags/release-1.11.0.tar.gz
@@ -12,5 +12,5 @@ ExternalProject_Add(
     INSTALL_COMMAND ""
 )
 
-ExternalProject_Get_Property(ext_googletest SOURCE_DIR)
-set(GOOGLETEST_SOURCE_DIR ${SOURCE_DIR})
+FetchContent_Populate(ext_googletest)
+FetchContent_GetProperties(ext_googletest SOURCE_DIR GOOGLETEST_SOURCE_DIR)
diff --git a/3rdparty/imgui/imgui.cmake b/3rdparty/imgui/imgui.cmake
index 752addd86a1..12ea3175736 100644
--- a/3rdparty/imgui/imgui.cmake
+++ b/3rdparty/imgui/imgui.cmake
@@ -1,6 +1,6 @@
-include(ExternalProject)
+include(FetchContent)
 
-ExternalProject_Add(
+FetchContent_Declare(
     ext_imgui
     PREFIX imgui
     URL https://github.com/ocornut/imgui/archive/refs/tags/v1.88.tar.gz
@@ -12,5 +12,5 @@ ExternalProject_Add(
     INSTALL_COMMAND ""
 )
 
-ExternalProject_Get_Property(ext_imgui SOURCE_DIR)
-set(IMGUI_SOURCE_DIR ${SOURCE_DIR})
+FetchContent_Populate(ext_imgui)
+FetchContent_GetProperties(ext_imgui SOURCE_DIR IMGUI_SOURCE_DIR)
diff --git a/3rdparty/qhull/qhull.cmake b/3rdparty/qhull/qhull.cmake
index c20c86c471f..fe15e83ca6f 100644
--- a/3rdparty/qhull/qhull.cmake
+++ b/3rdparty/qhull/qhull.cmake
@@ -1,6 +1,6 @@
-include(ExternalProject)
+include(FetchContent)
 
-ExternalProject_Add(
+FetchContent_Declare(
     ext_qhull
     PREFIX qhull
     # v8.0.0+ causes seg fault
@@ -14,5 +14,5 @@ ExternalProject_Add(
     INSTALL_COMMAND ""
 )
 
-ExternalProject_Get_Property(ext_qhull SOURCE_DIR)
-set(QHULL_SOURCE_DIR ${SOURCE_DIR})
+FetchContent_Populate(ext_qhull)
+FetchContent_GetProperties(ext_qhull SOURCE_DIR QHULL_SOURCE_DIR)
diff --git a/cmake/Open3DFetchISPCCompiler.cmake b/cmake/Open3DFetchISPCCompiler.cmake
index 3f7940c648b..1753b52325e 100644
--- a/cmake/Open3DFetchISPCCompiler.cmake
+++ b/cmake/Open3DFetchISPCCompiler.cmake
@@ -50,7 +50,11 @@ function(open3d_fetch_ispc_compiler)
         )
 
         FetchContent_MakeAvailable(ext_ispc)
+        if (WIN32)
+            set(CMAKE_ISPC_COMPILER "${ext_ispc_SOURCE_DIR}/bin/ispc.exe" PARENT_SCOPE)
+        else()  # Linux
+            set(CMAKE_ISPC_COMPILER "${ext_ispc_SOURCE_DIR}/bin/ispc" PARENT_SCOPE)
+        endif()
 
-        set(CMAKE_ISPC_COMPILER "${ext_ispc_SOURCE_DIR}/bin/ispc" PARENT_SCOPE)
     endif()
 endfunction()
diff --git a/cpp/open3d/core/nns/NNSIndex.h b/cpp/open3d/core/nns/NNSIndex.h
index 0e71a6d3a40..8eb8160da5d 100644
--- a/cpp/open3d/core/nns/NNSIndex.h
+++ b/cpp/open3d/core/nns/NNSIndex.h
@@ -51,7 +51,7 @@ class NNSIndex {
     /// \param knn Number of nearest neighbor to search.
     /// \return Pair of Tensors: (indices, distances):
     /// - indices: Tensor of shape {n, knn}, with dtype Int32.
-    /// - distainces: Tensor of shape {n, knn}, same dtype with dataset_points.
+    /// - distances: Tensor of shape {n, knn}, same dtype with dataset_points.
     virtual std::pair<Tensor, Tensor> SearchKnn(const Tensor &query_points,
                                                 int knn) const = 0;
 
@@ -61,7 +61,7 @@ class NNSIndex {
     /// dtype with dataset_points.
     /// \param radii list of radius. Must be 1D, with shape {n, }.
     /// \return Tuple of Tensors: (indices, distances, num_neighbors):
-    /// - indicecs: Tensor of shape {total_num_neighbors,}, dtype Int32.
+    /// - indices: Tensor of shape {total_num_neighbors,}, dtype Int32.
     /// - distances: Tensor of shape {total_num_neighbors,}, same dtype with
     /// dataset_points.
     /// - num_neighbors: Tensor of shape {n,}, dtype Int32.
@@ -76,7 +76,7 @@ class NNSIndex {
     /// dtype with dataset_points.
     /// \param radius Radius.
     /// \return Tuple of Tensors, (indices, distances, num_neighbors):
-    /// - indicecs: Tensor of shape {total_num_neighbors,}, dtype Int32.
+    /// - indices: Tensor of shape {total_num_neighbors,}, dtype Int32.
     /// - distances: Tensor of shape {total_num_neighbors,}, same dtype with
     /// dataset_points.
     /// - num_neighbors: Tensor of shape {n}, dtype Int32.
diff --git a/cpp/open3d/core/nns/NanoFlannIndex.h b/cpp/open3d/core/nns/NanoFlannIndex.h
index 32f0b48cedd..e092099d46e 100644
--- a/cpp/open3d/core/nns/NanoFlannIndex.h
+++ b/cpp/open3d/core/nns/NanoFlannIndex.h
@@ -54,7 +54,7 @@ class NanoFlannIndex : public NNSIndex {
     /// \param knn Number of nearest neighbor to search.
     /// \return Pair of Tensors: (indices, distances):
     /// - indices: Tensor of shape {n, knn}, with dtype Int32.
-    /// - distainces: Tensor of shape {n, knn}, same dtype with dataset_points.
+    /// - distances: Tensor of shape {n, knn}, same dtype with dataset_points.
     std::pair<Tensor, Tensor> SearchKnn(const Tensor &query_points,
                                         int knn) const override;
 
@@ -64,7 +64,7 @@ class NanoFlannIndex : public NNSIndex {
     /// dtype with dataset_points.
     /// \param radii list of radius. Must be 1D, with shape {n, }.
     /// \return Tuple of Tensors: (indices, distances, counts):
-    /// - indicecs: Tensor of shape {total_num_neighbors,}, dtype Int32.
+    /// - indices: Tensor of shape {total_num_neighbors,}, dtype Int32.
     /// - distances: Tensor of shape {total_num_neighbors,}, same dtype with
     /// dataset_points.
     /// - counts: Tensor of shape {n,}, dtype Int64.
@@ -79,7 +79,7 @@ class NanoFlannIndex : public NNSIndex {
     /// dtype with dataset_points.
     /// \param radius Radius.
     /// \return Tuple of Tensors, (indices, distances, counts):
-    /// - indicecs: Tensor of shape {total_num_neighbors,}, dtype Int32.
+    /// - indices: Tensor of shape {total_num_neighbors,}, dtype Int32.
     /// - distances: Tensor of shape {total_num_neighbors,}, same dtype with
     /// dataset_points.
     /// - counts: Tensor of shape {n}, dtype Int64.
diff --git a/cpp/open3d/core/nns/NearestNeighborSearch.h b/cpp/open3d/core/nns/NearestNeighborSearch.h
index 32fa6b87785..7ce92811dd9 100644
--- a/cpp/open3d/core/nns/NearestNeighborSearch.h
+++ b/cpp/open3d/core/nns/NearestNeighborSearch.h
@@ -76,7 +76,7 @@ class NearestNeighborSearch {
     /// \param radius Radius.
     /// \param sort Sort the results by distance. Default is True.
     /// \return Tuple of Tensors, (indices, distances, num_neighbors):
-    /// - indicecs: Tensor of shape {total_number_of_neighbors,}, with dtype
+    /// - indices: Tensor of shape {total_number_of_neighbors,}, with dtype
     /// same as index_dtype_.
     /// - distances: Tensor of shape {total_number_of_neighbors,}, same dtype
     /// with query_points. The distances are squared L2 distances.
@@ -91,7 +91,7 @@ class NearestNeighborSearch {
     /// \param radii Radii of query points. Each query point has one radius.
     /// Must be 1D, with shape {n,}.
     /// \return Tuple of Tensors, (indices,distances, num_neighbors):
-    /// - indicecs: Tensor of shape {total_number_of_neighbors,}, with dtype
+    /// - indices: Tensor of shape {total_number_of_neighbors,}, with dtype
     /// same as index_dtype_.
     /// - distances: Tensor of shape {total_number_of_neighbors,}, same dtype
     /// with query_points. The distances are squared L2 distances.
@@ -108,7 +108,7 @@ class NearestNeighborSearch {
     /// \param max_knn Maximum number of neighbor to search per query.
     /// \return Tuple of Tensors, (indices, distances, counts):
     /// - indices: Tensor of shape {n, knn}, with dtype same as index_dtype_.
-    /// - distainces: Tensor of shape {n, knn}, with same dtype with
+    /// - distances: Tensor of shape {n, knn}, with same dtype with
     /// query_points. The distances are squared L2 distances.
     /// - counts: Counts of neighbour for each query points. [Tensor
     /// of shape {n}, with dtype same as index_dtype_].