-
Notifications
You must be signed in to change notification settings - Fork 12
Commit
This commit does not belong to any branch on this repository, and may belong to a fork outside of the repository.
Merge pull request #251 from DeMarcoLab/v0.2-dev
v0.2.4 Release
- Loading branch information
Showing
178 changed files
with
2,866 additions
and
12,980 deletions.
There are no files selected for viewing
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
Original file line number | Diff line number | Diff line change |
---|---|---|
|
@@ -55,3 +55,4 @@ scratch/tile-images/* | |
fibsem/log/* | ||
fibsem/db/fibsem.db | ||
fibsem/notebook.ipynb | ||
scratch/health-monitor/* |
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
Original file line number | Diff line number | Diff line change |
---|---|---|
@@ -0,0 +1,72 @@ | ||
<Content Version="Fei ApplicationFile 1.1"> | ||
|
||
<!-- Application file for milling silicon (Si) without any gas for Xe PFIB --> | ||
|
||
|
||
<!-- Client tag determines where file is displayed to user. | ||
Can be XTUI, iFast or a combination separated by comma --> | ||
<Client xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="string"> | ||
XTUI, iFast | ||
</Client > | ||
|
||
|
||
<!-- Beam, must be Electron or Ion --> | ||
<Beam xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="string"> | ||
Ion | ||
</Beam> | ||
|
||
|
||
<!-- Pattern filter sets if file will be displayed for a given pattern type. | ||
Can be set to Line, Circle, Rectangle, CCS, RCS, Bitmap, StreamFile, Polygon | ||
Can be a combination separated by comma(s) --> | ||
<PatternType xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="string"> | ||
Line, Circle, Rectangle, Bitmap, Streamfile, Polygon, CCS, RCS | ||
</PatternType> | ||
|
||
|
||
<!-- Gas type, must match name of gas in UI or empty for no gas --> | ||
<GasType xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="string"> | ||
</GasType> | ||
|
||
|
||
<!-- Dwell time per point, in seconds, minimum is 50e-9 (50ns), maximum is 4.5e-3 (4.5 ms) --> | ||
<DwellTime xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="r8"> | ||
1.000E-6 | ||
</DwellTime> | ||
|
||
|
||
<!-- Overlap between points as percentage of the spot diameter. Must be < 100%. --> | ||
<Overlap xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="r8"> | ||
98 | ||
</Overlap> | ||
|
||
|
||
<!-- Volume per Dose, the volume of material that is deposited or removed per dose of the beam in m^3/Coulomb. | ||
1e-9 m^3/C = 1 um^3/nC. (Si) is 0.27 um^3/nc = 0.27e-9 m^3/C --> | ||
<VolumePerDose xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="r8"> | ||
0.00000000038 | ||
</VolumePerDose> | ||
|
||
|
||
<!-- Blur and Defocus. | ||
Blur- the additional beam diameter that is caused by defocussing in m. | ||
Note that the total beam diameter is the root of the sum of the | ||
squared beam, interaction and blur diameters. | ||
Defocus- Defocus the beam in m to longer or shorter working distance while patterning. | ||
Positive values will set focus value to a longer working distance. | ||
Negative values will set focus value to a shorter working distance. | ||
Only use a Blur or a Defocus value. Do not use both. | ||
If no value is to be set for patterning a Blur or Defocus must be set to a 0 --> | ||
<Blur xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="r8"> | ||
0 | ||
</Blur> | ||
|
||
|
||
<!-- Relative Interaction Diameter must always be set to 0. --> | ||
<RelativeInteractionDiameter xmlns:dt="urn:schemas-microsoft-com:datatypes" dt:dt="r8"> | ||
0 | ||
</RelativeInteractionDiameter> | ||
|
||
</Content> |
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
Original file line number | Diff line number | Diff line change |
---|---|---|
@@ -0,0 +1,16 @@ | ||
<Content Version="Fei ApplicationFile 1.1" xmlns:dt="urn:schemas-microsoft-com:datatypes"> | ||
<PatternType dt:dt="string">Line</PatternType> | ||
<Beam dt:dt="string">Electron</Beam> | ||
<GasType dt:dt="string">Pt cryo</GasType> | ||
<GasDutyCycle dt:dt="string">1:0.2</GasDutyCycle> | ||
<GasNeedlePosition dt:dt="string">1:cryo</GasNeedlePosition> | ||
<DwellTime dt:dt="r8">1E-07</DwellTime> | ||
<Overlap dt:dt="r8">-90</Overlap> | ||
<VolumePerDose dt:dt="r8">5E-11</VolumePerDose> | ||
<SaturationSputterRate dt:dt="r8">0</SaturationSputterRate> | ||
<RefreshTime dt:dt="r8">0</RefreshTime> | ||
<Defocus dt:dt="r8">0</Defocus> | ||
<InteractionDiameter dt:dt="r8">0</InteractionDiameter> | ||
<MaximumDosePerArea dt:dt="r8">0</MaximumDosePerArea> | ||
<SaturationCurrentDensity dt:dt="r8">1</SaturationCurrentDensity> | ||
</Content> |
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
This file contains bidirectional Unicode text that may be interpreted or compiled differently than what appears below. To review, open the file in an editor that reveals hidden Unicode characters.
Learn more about bidirectional Unicode characters
Oops, something went wrong.