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Update SiEPIC_EBeam_DRC.lydrc
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lukasc-ubc committed Jul 14, 2024
1 parent 0abd09c commit 27ed302
Showing 1 changed file with 5 additions and 5 deletions.
10 changes: 5 additions & 5 deletions klayout/EBeam/drc/SiEPIC_EBeam_DRC.lydrc
Original file line number Diff line number Diff line change
Expand Up @@ -48,8 +48,8 @@ LayerDeepTrench=input(201,0)
#################

# Check device overlaps (functional check)
overlaps = DevRec.merged(2)
output(overlaps, "Devices","Devices cannot be overlapping")
#overlaps = DevRec.merged(2)
#output(overlaps, "Devices","Devices cannot be overlapping")

# make sure the devices are within the floor plan layer region;
LayerSi.outside(LayerFP).output("Boundary","devices are out of boundary")
Expand All @@ -63,7 +63,7 @@ tol = 1e-3 # users typically shoot for exactly the min features
# for curves, this leads to lots of false errors.

# minimum feature size of Si is 70 nm and minimum exclusion between Si is 70 nm
LayerSi.width(0.07-tol, angle_limit(80)).output("Si_width","Si minimum feature size violation; min 60 nm")
LayerSi.width(0.06-tol, angle_limit(80)).output("Si_width","Si minimum feature size violation; min 60 nm")
#LayerSip6nm.width(0.07-tol, angle_limit(80)).output("Sip6nm_width","Si minimum feature size violation; min 60 nm")
LayerSi.space(0.07-tol, angle_limit(80)).output("Si_space","Si minimum space violation; min 60 nm")
#LayerSip6nm.space(0.07-tol, angle_limit(80)).output("Sip6nm_space","Si minimum space violation; min 60 nm")
Expand Down Expand Up @@ -121,8 +121,8 @@ LayerM2.overlap(LayerM1,3.0-tol).output("M2_M1_overlap","M2 minimum overlap with
# Waveguide checks:
# disconnects, mismatched

PinRec.not_inside(LayerSi).and(PinRec.not_inside(LayerSiN))
.output( "SiEPIC-1a" , "Warning: Possible waveguide mismatch or waveguide disconnect: PinRec must enclose only one waveguide material." )
#PinRec.not_inside(LayerSi).and(PinRec.not_inside(LayerSiN))
# .output( "SiEPIC-1a" , "Warning: Possible waveguide mismatch or waveguide disconnect: PinRec must enclose only one waveguide material." )

LayerDeepTrench.separation(LayerM2, 20.0-tol).output("DT_Metal_separation","DT-Metal minimum separation violation; min 20 µm")</text>
</klayout-macro>

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