FaML

.gitignore

@@ -1,6 +1,6 @@
 merge/EBeam.oas
 merge/EBeam.txt
-
+*.lyrdb
 
 # Byte-compiled / optimized / DLL files
 */*.pyc

DFT.md

@@ -0,0 +1,56 @@
+
+# Design for Test rules
+
+- All design submissions must follow the Design for Test (DFT) rules. Three optical interfaces are available: surface grating couplers (GC), facet-attached micro-lenses (FaML), and facet-attached vertical emitters (FAVE).
+
+## Grating Couplers
+
+- area design maximum: 1000 µm wide, 500 µm high
+- grating coupler cells:
+  - SiEPIC_EBeam_PDK -> EBeam-SiN -> 
+    - GC_SiN_TE_1310_8degOxide_BB
+    - GC_SiN_TE_1550_8degOxide_BB
+- 127 µm pitch, verically aligned, single column, connected circuits
+- up to 4 grating couplers
+- opt_in label format: opt_in_TE_1550_device_designerUniqueIndentifier
+- opt_in label location: the tip (0,0) of the grating coupler cell at the input
+- Fiber Array test consists of: 
+  - 1 (top GC): output, to detector
+  - 2: input, laser
+  - 3: output, to detector
+  - 4 (bottom GC): output, to detector
+- See example: EBeam_LukasChrostowski_MZI_1550.oas
+
+## Facet-attached Micro-Lenses (FaML)
+
+- area design maximum: 1000 µm wide, 500 µm high
+- FaML coupler cells:
+  - SiEPIC_EBeam_PDK -> EBeam-Dream -> 
+    - ebeam_dream_FaML_SiN_1550_BB
+- 127 µm pitch, verically aligned, single column, connected circuits
+- up to 4 lenses
+- opt_in label format: opt_in_TE_1550_FaML_designerUniqueIndentifier
+- opt_in label location: the lens and chip edge (0,0) of the FaML cell at the input
+- Fiber Array test consists of: 
+  - 1 (top FaML): input, laser
+  - 2 (middle FaML): output, to detector
+  - 3 (middle FaML): output, to detector
+  - 4 (bottom FaML): output, to detector
+- See example: EBeam_LukasChrostowski_MZI1_1550_FaML.oas
+
+## Facet-attached Vertical Emitters (FAVE)
+
+- area design maximum: 1000 µm wide, 500 µm high
+- FaML coupler cells:
+  - SiEPIC_EBeam_PDK -> EBeam-Dream -> 
+    - ebeam_dream_FAVE_SiN_1550_BB
+- 127 µm pitch, verically aligned, single column, connected circuits
+- up to 4 lenses
+- opt_in label format: opt_in_TE_1550_FAVE_designerUniqueIndentifier
+- opt_in label location: the edge (0,0) of the FAVE cell at the input
+- Fiber Array test consists of: 
+  - 1 (top FAVE): input, laser
+  - 2 (middle FAVE): output, to detector
+  - 3 (middle FAVE): output, to detector
+  - 4 (bottom FAVE): output, to detector
+- See example: EBeam_LukasChrostowski_MZI_1550_FAVE.oas

README.md

@@ -11,7 +11,10 @@
 - Baseline process:
   - Single full etch, using a negative resist (HSQ)
   - Oxide cladding
+  - Edge coupling
+- Facet-attached micro-lenses and vertical emitters
 - Process Design Kit: [SiEPIC-EBeam-PDK](https://github.com/siepic/SiEPIC_EBeam_PDK) 
+- [Design for Test rules](DFT.md)
 
 ## Layer table
 | Name            | Layer/datatype | Description                                                                          |

merge/EBeam_merge.py

@@ -18,9 +18,10 @@
 tech_name = 'EBeam'
 top_cell_name = 'EBeam_2024_10_SiN'
 cell_Width = 1000e3
-cell_Height = 410000
-cell_Gap_Width = 8000
-cell_Gap_Height = 8000
+cell_FaML_width_extra = 100e3
+cell_Height = 500e3
+cell_Gap_Width = 8e3
+cell_Gap_Height = 8e3
 chip_Width = 8650000
 chip_Height1 = 8490000
 chip_Height2 = 8780000
@@ -32,7 +33,7 @@
 tr_cutout_y = 8494000
 
 filename_out = 'EBeam'
-layers_keep = ['1/5', '4/0', '1/10', '68/0', '81/0', '10/0', '99/0', '26/0', '31/0', '32/0', '33/0', '998/0']
+layers_keep = ['1/5', '4/0', '1/10', '68/0', '81/0', '10/0', '99/0', '26/0', '31/0', '32/0', '33/0', '201/0','998/0']
 layer_text = '10/0'
 layer_SEM = '200/0'
 layer_SEM_allow = ['edXphot1x', 'ELEC413','SiEPIC_Passives']  # which submission folder is allowed to include SEM images
@@ -51,7 +52,7 @@
 
 # KLayout
 import pya
-from pya import *
+from pya import Trans, CellInstArray, Text
 
 # SiEPIC-Tools
 import SiEPIC
@@ -115,12 +116,18 @@ def log(text):
 path2 = os.path.abspath(os.path.join(path,"../submissions"))
 _, _, files = next(os.walk(path2), (None, None, []))
 for f in sorted(files):
-    files_in.append(os.path.join(path2,f))
+    if 'FaML' in f:
+        files_in.append(os.path.join(path2,f))
+for f in sorted(files):
+    if 'FaML' not in f:
+        files_in.append(os.path.join(path2,f))
 
 # Create course cells using the folder name under the top cell
 cell_edXphot1x = layout.create_cell("edX")
 t = Trans(Trans.R0, 0,0)
 top_cell.insert(CellInstArray(cell_edXphot1x.cell_index(), t))
+cell_FaML = layout.create_cell("FaML")
+top_cell.insert(CellInstArray(cell_FaML.cell_index(), t))
 cell_ELEC413 = layout.create_cell("ELEC413")
 top_cell.insert(CellInstArray(cell_ELEC413.cell_index(), t))
 cell_SiEPIC_Passives = layout.create_cell("SiEPIC_Passives")
@@ -137,6 +144,7 @@ def log(text):
 
 # Origins for the layouts
 x,y = 110e3,cell_Height+cell_Gap_Height
+previous_top_FaML = None
 
 import subprocess
 import pandas as pd
@@ -160,16 +168,17 @@ def log(text):
     layout2 = pya.Layout()
     layout2.read(f)
 
+    course = 'openEBL'
     if 'ebeam' in basefilename.lower():
         course = 'edXphot1x'
-    elif 'elec413' in basefilename.lower():
+    if 'faml' in basefilename.lower():
+        course = 'FaML'
+    if 'elec413' in basefilename.lower():
         course = 'ELEC413'
-    elif 'openebl' in basefilename.lower():
+    if 'openebl' in basefilename.lower():
         course = 'openEBL'
-    elif 'siepic_passives' in basefilename.lower():
+    if 'siepic_passives' in basefilename.lower():
         course = 'SiEPIC_Passives'
-    else:
-        course = 'openEBL'
 
     cell_course = eval('cell_' + course)
     log("  - course name: %s" % (course) )
@@ -193,7 +202,15 @@ def log(text):
     # check that there is one top cell in the layout
     num_top_cells = len(layout2.top_cells())
     if num_top_cells > 1:
-        log('  - layout should only contain one top cell; contains (%s): %s' % (num_top_cells, [c.name for c in layout2.top_cells()]) )
+        log('  - WARNING: layout should only contain one top cell; contains (%s): %s' % (num_top_cells, [c.name for c in layout2.top_cells()]) )        
+        top_cells = layout2.top_cells()
+        top_cells.sort(key=lambda x: x.child_instances())
+        log('  - top cell (%s) has %s child_instances (highest one); renaming to "top".' % (top_cells[-1].name, top_cells[-1].child_instances()) ) 
+        top_cells[-1].name = 'top'
+        '''
+        for cell in layout2.top_cells():
+            log('  - top cell (%s) has %s hierarchy levels' % (cell.name, cell.hierarchy_levels()) ) 
+        '''
     if num_top_cells == 0:
         log('  - layout does not contain a top cell')
 
@@ -258,6 +275,7 @@ def log(text):
                         shapes_to_delete.append( s.shape() )
                     s.next()
                 for s in shapes_to_delete:
+                    # need to delete the shapes all together, since the list of shapes in the shape recursive iterator changes if you delete one
                     s.delete()
 
             # bounding box of the cell
@@ -269,24 +287,24 @@ def log(text):
             t = Trans(Trans.R0, -bbox.left,-bbox.bottom)
             subcell2.insert(CellInstArray(subcell.cell_index(), t))
 
-            # clip cells
-            cell2 = layout2.clip(cell.cell_index(), pya.Box(bbox.left,bbox.bottom,bbox.left+cell_Width,bbox.bottom+cell_Height))
+            # clip / crop cells
+            cell2 = layout2.clip(cell.cell_index(), pya.Box(bbox.left,bbox.bottom,bbox.left+cell_Width+(cell_FaML_width_extra if course == 'FaML' else 0),bbox.bottom+cell_Height))
             bbox2 = layout2.cell(cell2).bbox()
             if bbox != bbox2:
-                log('  - WARNING: Cell was clipped to maximum size of %s X %s' % (cell_Width, cell_Height) )
+                log('  - WARNING: Cell was clipped to maximum size of %s X %s' % (cell_Width +(cell_FaML_width_extra if course == 'FaML' else 0), cell_Height) )
                 log('  - clipped bounding box: %s' % bbox2.to_s() )
 
-            # copy
-            subcell.copy_tree(layout2.cell(cell2))  
-
+            subcell.copy_tree(cell)  
+            '''
+            if course is not 'FaML':
+                # copy
+                subcell.copy_tree(layout2.cell(cell2))  
+            else:
+                subcell.copy_tree(cell)  
+            '''
+
             # Check if this cell would overlap with other Floorplans, then move if necessary
-            def next_position(x, y, subcell, cell_Gap_Height, cell_Gap_Width, chip_Height, cell_Height, cell_Width):
-                # Measure the height of the cell that was added, and move up
-                y += cell_Gap_Height
-                if y + cell_Height > chip_Height:
-                    y = cell_Height + cell_Gap_Height
-                    x += cell_Width + cell_Gap_Width
-                return x, y
+
             # Get Floorplan regions for the entire chip so far
             Layer_FP = layout.find_layer(99,0)  # or use "layer"
             iter1 = pya.RecursiveShapeIterator(layout, top_cell, Layer_FP )
@@ -297,23 +315,85 @@ def next_position(x, y, subcell, cell_Gap_Height, cell_Gap_Width, chip_Height, c
                 iter1.next()        
             r1.merge()
             # print("   - Floorplan merged: %s" % r1)
+
+            # offset for the facet-attached micro lenses
+            if course == 'FaML':
+                x_offset = -100e3
+                # Find the FaML cells, and make sure they are on a 127 µm pitch
+                def sub_instances(instance,name):
+                    found_instances = []
+                    if type(instance) == pya.Cell:
+                        cell = instance
+                    else:
+                        cell = instance.cell()
+                    for inst in cell.each_inst():
+                        # log(' - looking for FaML instance: %s' % (inst.to_s()))
+                        if inst.cell.name == name:
+                            found_instances.append(inst)
+                            # log(' - Found FaML instance: %s, %s' % (inst.to_s(), inst.cell.name))
+                        elif inst.cell.child_instances() > 0:
+                            for f in sub_instances(inst,name):
+                                if f.cell.name == name:
+                                    found_instances.append(f)
+                    return found_instances
+
+                found_faml_instances = sub_instances(layout2.top_cells()[0], name = 'ebeam_dream_FaML_SiN_1550_BB')
+                #for f in found_faml_instances:
+                #    log('  - Found FaML instance: %s, %s' % (f.to_s(), f.cell.name))
+                found_faml_instances.sort(key=lambda x: -x.cplx_trans.disp.y)
+                for f in found_faml_instances:
+                    log('  - Found FaML instance (sorted): %s, %s' % (f.to_s(), f.cell.name))
+                top_FaML = found_faml_instances[0].cplx_trans.disp.y
+
+            else:
+                x_offset = 0
+
+            def next_position(x, y, cell_Gap_Height, cell_Gap_Width, chip_Height, cell_Height, cell_Width):
+                # Measure the height of the cell that was added, and move up
+                y += cell_Gap_Height
+                if y + cell_Height > chip_Height:
+                    y = cell_Height + cell_Gap_Height
+                    x += cell_Width + cell_Gap_Width
+                return x, y
 
             interacting = True
             while interacting:
-                r2 = pya.Region(pya.Box(x,y, x+bbox2.width(),y+bbox2.height()))
+                r2 = pya.Region(pya.Box(x+x_offset,y, x+x_offset+bbox2.width(),y+bbox2.height()))
                 interacting = r2.interacting(r1)
                 if interacting:
                     # print("   - Overlapping Floorplan: %s" % r2.interacting(r1))
-                    x,y = next_position(x, y, subcell, cell_Gap_Height, cell_Gap_Width, chip_Height2, cell_Height, cell_Width)
+                    x,y = next_position(x, y, cell_Gap_Height, cell_Gap_Width, chip_Height2, cell_Height, cell_Width)
+
+            if course == 'FaML':
+                # Check and snap to 127 µm pitch
+                if previous_top_FaML:
+                    FaML_delta = top_FaML+y - previous_top_FaML
+                    log('  - FaML count: %s' % (FaML_delta/127e3) )
+                    if FaML_delta % 127e3 > 0:
+                        # log('  - Adjancent designs do not have matching FaML pitch: %s error' % (FaML_delta) )
+                        y_add = 127e3 - FaML_delta % 127e3
+                        log('  - shifting design up by %s µm, to have matching FaML pitch.' % (y_add/1e3) )
+                        y += y_add
+
 
             # Insert cell instance in the chip
-            t = Trans(Trans.R0, x,y)
+            t = Trans(Trans.R0, x+x_offset,y)
             cell_course.insert(CellInstArray(subcell2.cell_index(), t))
 
-            log('  - Placed at position: %s, %s' % (x,y) )
+            log('  - Design placed at position: %s, %s' % (x,y) )
+
+            if course == 'FaML':
+                # record placement of FaML
+                previous_top_FaML = found_faml_instances[0].cplx_trans.disp.y + y
+                log('  - top FaML position: %s' % (previous_top_FaML) )
 
             # Measure the height of the cell that was added, and move up
-            y += max (cell_Height, subcell.bbox().height()) + cell_Gap_Height
+            #y += max (cell_Height, subcell.bbox().height()) + cell_Gap_Height
+            if course == 'FaML':
+                from math import ceil
+                y += ceil(subcell.bbox().height()/127e3)*127e3
+            else:
+                y += subcell.bbox().height() + cell_Gap_Height
             # move right and bottom when we reach the top of the chip
             if y + cell_Height > chip_Height1 and x == 0:
                 y = cell_Height + cell_Gap_Height
@@ -332,6 +412,8 @@ def next_position(x, y, subcell, cell_Gap_Height, cell_Gap_Width, chip_Height, c
             # Check bottom right cutout #2 for PCM
             if x + cell_Width > br_cutout2_x and y < br_cutout2_y:
                 y = br_cutout2_y
+        else:
+            log("  - WARNING: Top cell not merged (%s)" % cell.name)
 
 '''
 text_out,opt_in = find_automated_measurement_labels(topcell=top_cell, LayerTextN=layerTextN)

run_verification.py

@@ -15,9 +15,15 @@
 
 """
 
+cell_Width = 1000e3
+cell_Height = 500e3
+cell_FaML_width_extra = 100e3
+
+
 # gds file to run verification on
 gds_file = sys.argv[1]
 
+
 try:
    # load into layout
    layout = pya.Layout()
@@ -52,11 +58,13 @@
    num_errors = layout_check(cell = top_cell, verbose=False, GUI=True, file_rdb=file_lyrdb)
 
    # Make sure layout extent fits within the allocated area.
-   cell_Width = 1000e3
-   cell_Height = 410000
+   if 'faml' in filename.lower():
+      cell_Width_check = cell_Width + cell_FaML_width_extra
+   else:
+      cell_Width_check = cell_Width
    bbox = top_cell.bbox()
-   if bbox.width() > cell_Width or bbox.height() > cell_Height:
-      print('Error: Cell bounding box / extent (%s, %s) is larger than the maximum size of %s X %s microns' % (bbox.width()/1000, bbox.height()/1000, cell_Width/1000, cell_Height/1000) )
+   if bbox.width() > cell_Width_check or bbox.height() > cell_Height:
+      print('Error: Cell bounding box / extent (%s, %s) is larger than the maximum size of %s X %s microns' % (bbox.width()/1000, bbox.height()/1000, cell_Width_check/1000, cell_Height/1000) )
       num_errors += 1
 except:
    print('Unknown error occurred')